A Digital-to-Analog Converter of Displacement by an Integrated Micromechanism
A Digital-to-Analog Converter of Displacement by an Integrated Micromechanism
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集成微机械位移数模转换器
DOI：
10.1143/jjap.38.l593
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发表时间：
1999
影响因子：
1.5
通讯作者：
Y. Wada
中科院分区：
文献类型：
--
作者：
H. Toshiyoshi;D. Kobayashi;M. Mita;G. Hashiguchi;H. Fujita;J. Endo;Y. Wada
我们新发明了一种用于精确位置控制的微机构，它相当于R-2R电阻网络的电子数模转换器（DAC）。采用微机械加工技术在绝缘体上硅晶圆上制备了微机械C-2C柔性悬浮网络。当对微机构施加n位数字驱动电压时，级联静电微致动器产生±1µm的一组位移。这些位移在二元权值的悬架网络中累积，合成类dac位移输出。在4位输入的情况下，定位分辨率为0.38µm，移动位移为6µm。通过增加输入的寻址大小，可以进一步提高分辨率。
We have newly invented a micromechanism for precise position control, which is equivalent to that of an electrical digital-to-analog converter(DAC) of the R-2R resistor network. The micromechanical C-2C compliance suspension network has been fabricated on a silicon-on-insulator wafer by a micromachining technique. When N-bit digital driving voltages are applied to the micromechanism, cascaded electrostatic microactuators produce a set of displacements of ±1 µm. These displacements accumulate in the suspension network with binary weights to synthesize DAC-like displacement output. A traveling displacement of 6 µm is obtained while the positioning resolution is 0.38 µm in the case of 4 bit input. Resolution can be improved further by increasing the addressing size of the input.