Electrophoretic Deposition of Barium Titanate Films from a High-Concentration Metal Alkoxide Sol
Electrophoretic Deposition of Barium Titanate Films from a High-Concentration Metal Alkoxide Sol
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高浓度金属醇盐溶胶电泳沉积钛酸钡薄膜
DOI：
10.2109/jcersj.110.1035
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发表时间：
2002
期刊：
影响因子：
--
通讯作者：
M. Kuwabara
中科院分区：
文献类型：
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作者：
Satoshi Shindou;M. Kuwabara
采用高浓度溶胶-凝胶法和电泳沉积技术制备了钛酸钡薄膜。通过水解高浓度醇盐前体溶液制备颗粒。在水解阶段，重要的是使用足够量的水来产生颗粒，并且用冷却装置冷却水解的前体溶液以防止凝胶形成。当在该对电极上施加电压时，在阴极处沉积凝胶膜。在低温下加热凝胶膜得到化学计量比的BaTiO 3薄膜。该过程似乎是由于高浓度溶胶中的颗粒通过电泳而沉积。所形成的凝胶膜具有两层结构。牢固地粘附到电极板的下层是致密的，并且该层覆盖有松散的凝胶膜的上层。
We used a high-concentration sol-gel process and an electrophoretic deposition technique to synthesize BaTiO 3 films. The particles were prepared by hydrolyzing a high-concentration alkoxide precursor solution. At the hydrolysis stage, it was important to use a sufficient amount of water to produce the particles, and to cool the hydrolyzed precursor solution with a cooling device to prevent gel from forming. When voltage was applied across the pair of electrodes, a gel film was deposited at the cathode. Heating the gel films at low temperature yielded stoichiometric BaTiO 3 films. The process appears to be due to the deposition by electrophoresis of particles from the high-concentration sol. The gel films that were formed had a two-layer structure. The lower layer that firmly adhered to the electrode plate was dense, and this layer was overlaid with the upper layer of a loose gel film.