Optimizing particle characteristics of nanocrystalline aluminum nitride
Optimizing particle characteristics of nanocrystalline aluminum nitride
复制标题
纳米氮化铝颗粒特性的优化
DOI：
10.1016/j.powtec.2017.12.009
复制
发表时间：
2018-02
影响因子：
5.2
通讯作者：
S. Ognjanović;M. Winterer
中科院分区：
文献类型：
--
作者：
S. Ognjanović;M. Winterer
以三乙基铝(TEAL)和氨水为原料，采用化学气相合成法(CVS)合成了纳米氮化铝(AlN)粉末。利用一个简单的反应-凝聚-烧结模型，研究了热壁反应器温度和系统压力等工艺参数对颗粒特性的影响，如尺寸和团聚。模拟结果与实验数据吻合较好，能够更好地理解温度和压力对颗粒尺寸和微观结构的影响。在所测试的所有工艺参数下，都得到了纯的纤锌矿相AlN纳米晶。一次颗粒(微晶)尺寸为2.7 nm~11.5 nm，二次颗粒尺寸为4.3 nm~12.4 nm。正如模拟预测的那样，实验显示出低程度的(硬)团聚，对于高于1400℃和100 mbar的合成，甚至达到1的值，这意味着在这些条件下完全没有硬团聚。
Aluminum nitride (AlN) nanopowders are synthesized in a chemical vapor synthesis (CVS) process using triethylaluminum (TEAl) and ammonia as precursors. A simple reaction-coagulation-sintering model is used to investigate the influence of process parameters, such as hot-wall reactor temperature and system pressure, on particle characteristics: size and agglomeration for example. The results of these simulations show good agreement with the experimental data and enable a better understanding of these effects of temperature and pressure on particle size and microstructure. Pure wurtzite phase AlN nanocrystals are obtained for all tested process parameters. The primary particle (crystallite) size ranges from 2.7 nm to 11.5 nm with (secondary) particle size in the range of 4.3 nm to 12.4 nm. As predicted by the simulations, the experiments show a low degree of (hard) agglomeration that even reaches the value of 1 for syntheses above 1400 °C and 100 mbar, implying the complete absence of hard agglomerates at those conditions.