Photolysis of organically modified gel films and its application to the fine-patterning of oxide thin films
Photolysis of organically modified gel films and its application to the fine-patterning of oxide thin films
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有机改性凝胶膜的光解及其在氧化物薄膜精细图案化中的应用
DOI：
10.1117/12.188995
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发表时间：
1994
期刊：
影响因子：
--
通讯作者：
T. Minami
中科院分区：
文献类型：
--
作者：
N. Tohge;Katsuhide Shinmou;T. Minami
精细图案化工艺对于溶胶-凝胶薄膜在光学和电子器件中的应用非常重要。在本研究中，一种新的技术图案化的氧化物薄膜已被开发。从用（β）-二酮化学改性的金属-醇盐获得的凝胶膜在螯合键中的（pi）-（pi）* 跃迁的特征UV范围内具有光学吸收带。对应于此过渡的紫外光照射解离螯合键，同时降低了凝胶膜在酸性溶液或醇中的溶解度。这些发现表明凝胶膜中发生了一些结构变化。有机改性的凝胶膜的溶解度的变化，通过紫外线照射已被施加到精细图案化过程中，凝胶膜用紫外线照射，并在适当的溶液中浸出，然后通过热处理。本工艺使我们能够在各种基材上制作精细的ZrO 2和TiO 2薄膜图案。
The fine-patterning process is very important for the application of sol-gel derived thin films to optical and electronic devices. In the present study, a new technique for the patterning of oxide thin films has been developed. Gel films obtained from metal-alkoxides chemically modified with (beta) -diketones have optical absorption bands in the UV-range characteristic of the (pi) -(pi) * transition in chelate bonds. The irradiation of UV-light corresponding to this transition dissociated the chelate bonds and simultaneously decreased the solubility of the gel films in acidic solutions or alcohols. These findings are indicative of the occurrence of some structural changes in the gel films. The change in solubility of organically modified gel films by the UV-irradiation has been applied to the fine-patterning process; the gel films were irradiated with UV-light and leached in appropriate solutions, followed by the heat-treatment. The present process enables us to make fine-patterns of ZrO2 and TiO2 films on a variety of substrates.