Oberbation of sationary plasma striation and collimated plasma transport in a 100 kHz inductively coupled plasma discharge
Oberbation of sationary plasma striation and collimated plasma transport in a 100 kHz inductively coupled plasma discharge
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100 kHz 电感耦合等离子体放电中静止等离子体条纹和准直等离子体输运的观察
DOI：
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发表时间：
2014
影响因子：
1.5
通讯作者：
Kazunori Takahashi and Akira Ando
中科院分区：
文献类型：
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作者：
Kohei Yamanoi,Takahiro Murata;Yasunobu Arikawa;Tomoharu Nakazato;Toshihiko Shimizu;Nobuhiko Sarukura;Mitsuo Nakai;Hiroaki Nishimura;Hiroshi Azechi,;Kazunori Takahashi and Akira Ando
