Development of a niobium nanosuperconducting quantum interference device for the detection of small spin populations
Development of a niobium nanosuperconducting quantum interference device for the detection of small spin populations
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DOI：
10.1063/1.1554770
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发表时间：
2003-02-17
影响因子：
4
通讯作者：
Tilbrook, DL
中科院分区：
文献类型：
--
作者：
Lam, SKH;Tilbrook, DL
电子束光刻和反应离子刻蚀已经被用来制作宽度接近50 nm的Au/Nb薄膜桥。Au层既被用作刻蚀Nb超导桥的掩模，又被用作完成器件的阻性分流。利用这些结，还制作了孔尺寸为200 nm×200 nm(纳米SQUID)的直流超导量子干涉器件(SQUID)并对其进行了表征。在4.2K下获得了约7×10(-6)Phi(0)/Hz(1/2)的磁通噪声，由此计算出的自旋灵敏度为250自旋/Hz(1/2)。(C)2003年美国物理研究所。
Electron-beam lithography and reactive ion etching have been used to fabricate thin-film Au/Nb bridges with widths similar to50 nm. The Au layer was used as both a mask for etching the Nb superconducting bridge and as a resistive shunt in the completed devices. Using these junctions, a dc superconducting quantum interference device (SQUID) design with a hole size of 200 nmx200 nm (nano-SQUID) has also been fabricated and characterized. A flux noise of approximately 7x10(-6) Phi(0)/Hz(1/2) at 4.2 K has been achieved, from which a calculated spin sensitivity of 250 spin/Hz(1/2) is predicted. (C) 2003 American Institute of Physics.