Structural, mechanical and hydrophobic properties of fluorine-doped diamond-like carbon films synthesized by plasma immersion ion implantation and deposition (PIII–D)
Structural, mechanical and hydrophobic properties of fluorine-doped diamond-like carbon films synthesized by plasma immersion ion implantation and deposition (PIII–D)
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DOI：
10.1016/j.apsusc.2004.02.044
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发表时间：
2004-05
影响因子：
6.7
通讯作者：
Z. Yao;P. Yang;Nan Huang;Hong Sun;Jian Wang
中科院分区：
文献类型：
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作者：
Z. Yao;P. Yang;Nan Huang;Hong Sun;Jian Wang
采用等离子体浸没离子注入和淀积（PIII-D）方法在Si基片上制备了不同氟含量的掺氟类金刚石（a-C：F）薄膜。利用X射线光电子能谱（XPS）和拉曼散射光谱对薄膜的组成和结构进行了表征。用原子力显微镜（AFM）分析了表面形貌和粗糙度。硬度和耐刮擦性分别通过纳米压痕和纳米划痕测量。用座滴法测定水接触角。随着CF 4流量的增加，薄膜中的氟含量逐渐增加。拉曼光谱表明薄膜具有类金刚石结构。在类金刚石薄膜中添加氟元素对薄膜性能有重要影响。由于F+的刻蚀行为，薄膜表面变得更加光滑。硬度显著降低，而耐刮擦性结果表明，这些膜具有相当好的附着到基底。膜的疏水性得到明显改善，双蒸水接触角接近聚四氟乙烯（PTFE）。研究表明，PIII-D法合成的类金刚石结构的掺氟非晶碳膜具有上级的力学性能和非润湿性，可拓展其广泛的应用领域。
Fluorine-doped diamond-like carbon (a-C:F) films with different fluorine content were fabricated on Si wafer by plasma immersion ion implantation and deposition (PIII–D). Film composition and structure were characterized by X-ray photoelectron spectroscopy (XPS) and Raman scattering spectroscopy. Surface morphology and roughness were analyzed by atomic force microscopy (AFM). Hardness and scratch resistance were measured by nano-indentation and nano-scratch, respectively. Water contact angles were measured by sessile drop method. With the increase of the CF4flux, fluorine content was gradually increased to the film. Raman spectra indicates that these films have a diamond-like structure. The addition of fluorine to diamond-like carbon films had a critical influence on the film properties. The film surface becomes more smoother due to the etching behavior of F+. Hardness was significantly reduced, while the scratch resistance results show that these films have a fairly good adhesion to the substrate. Evident improvements of the hydrophobicity have been made to these films, with contact angles of double-stilled water approaching that of polytetrafluoroethylene (PTFE). Our study suggests that broad application regions of the fluorine-doped amorphous carbon films with diamond-like structure, synthesized by PIII–D, can be extended by combining the non-wetting properties and mechanical properties which are far superior to those of PTFE.