SCANNING SECONDARY ION ANALYTICAL MICROSCOPY WITH PARALLEL DETECTION
SCANNING SECONDARY ION ANALYTICAL MICROSCOPY WITH PARALLEL DETECTION
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DOI：
10.1016/0248-4900(92)90007-n
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发表时间：
1992-01-01
影响因子：
2.7
通讯作者：
HILLION, F
中科院分区：
文献类型：
--
作者：
SLODZIAN, G;DAIGNE, B;HILLION, F
这里描述的二次离子显微镜允许获得组成样品的几种元素的化学和同位素分布图的同时注册。 该仪器经过专门设计，以优化灵敏度和选择性：用一次Cs+离子轰击，以增加负二次离子的电离产率，在靶表面有效收集二次离子，使二次离子束集光率与工作在高质量分辨率的质谱仪的接受度相匹配，具有并行检测能力的质谱仪。 探针直径可以低至30 nm，并且离子感应电子图像与离子图像同时配准。 目前，四个离子显微照片同时获得超过一个视场高达20 × 20 μ-m2包含高达512 × 512像素。 示出了具有0.1 μ m的离子探针直径的示例。
The secondary ion microscope described here allows to obtain the simultaneous registration of chemical and isotopic distribution maps of several elements composing the sample. The instrument has been specially designed to optimize both sensitivity and selectivity: bombardment with primary Cs+ ions to increase the ionization yields of negative secondary ions, efficient collection of secondary ions at the target surface, matching of the secondary ion beam etendue with the acceptance of the mass spectrometer working at high mass resolution, spectrometer with parallel detection capabilities. The probe diameter can be made as low as 30 nm and ion induced electron images registered at the same time as ion images. Presently, four ion micrographs are obtained simultaneously over a field of view up to 20 x 20-mu-m2 containing up to 512 x 512 pixels. Examples are shown with an ion probe diameter of 0.1-mu-m.