Leakage current reduction by thermal oxidation in Ni/Au Schottky contacts on lattice-matched In0.18Al0.82N/GaN heterostructures

Leakage current reduction by thermal oxidation in Ni/Au Schottky contacts on lattice-matched In0.18Al0.82N/GaN heterostructures
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通过热氧化减少晶格匹配 In0.18Al0.82N/GaN 异质结构上 Ni/Au 肖特基接触的漏电流

DOI:
10.1088/1674-1056/23/3/037303
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发表时间:
2014
期刊:
影响因子:
1.7
通讯作者:
Wei Ke
Wei Ke
中科院分区:
物理与天体物理3区
文献类型:
--
作者:
Lu Li-Wu;Xu Fu-Jun;Liu Xin-Yu;Wei Ke

文献摘要

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By using temperature-dependent current—voltage, variable-frequency capacitance-voltage, and Hall measurements, the effects of the thermal oxidation on the electrical properties of Ni/Au Schottky contacts on lattice-matched In0.18Al0.82N/GaN heterostructur