Soft X-ray Detection Performance of Superconducting Tunnel Junction Arrays with Asymmetric Tunnel Junction Layer Structure
Soft X-ray Detection Performance of Superconducting Tunnel Junction Arrays with Asymmetric Tunnel Junction Layer Structure
复制标题
非对称隧道结层结构超导隧道结阵列的软X射线探测性能
DOI：
10.1143/jjap.51.010115
复制
发表时间：
2011
影响因子：
1.5
通讯作者：
M. Ohkubo
中科院分区：
文献类型：
--
作者：
M. Ukibe;S. Shiki;Y. Kitajima;M. Ohkubo
采用非对称隧道结层结构研制了100 eV ~ 1 keV软X射线超导隧道结阵列探测器。非对称层设计有效地解决了STJ探测器中常见的对单色X射线的双峰响应问题。通过剥离技术图案化敏感区域，确保顶部Nb电极表面上没有污染。100像素的STJ阵列探测器的性能进行了研究，通过荧光X射线分析的氧，氮，硼的K线的能量区域的氧化物和氮化物。STJ阵列探测器的能量分辨率<15 eV，这是半导体探测器无法实现的，能量非线性<1%。结果表明，该性能适用于轻痕量元素的荧光产额X射线吸收精细结构（XAFS）光谱。
Superconducting tunnel junction (STJ) array detectors with an asymmetric tunnel junction layer structure have been fabricated for the soft X-ray region between 100 eV and 1 keV. The asymmetric layer design was effective in solving the problem of double peak response to monochromatic X-rays, which is commonly observed in STJ detectors. The sensitive area was patterned by a lift-off technique that ensured no contamination on the top Nb electrode surface. The performance of a 100-pixel STJ array detector was investigated through fluorescent X-ray analysis of oxides and nitrides for the energy region of the K-lines of oxygen, nitrogen, and boron. The STJ array detector exhibited a high energy resolution of <15 eV, which cannot be achieved by semiconductor detectors, and an energy nonlinearity of <1%. It was demonstrated that the performance is suitable for fluorescence-yield X-ray absorption fine structure (XAFS) spectroscopy for light trace elements.