Improving the sensitivity of piezoelectric excited millimeter-sized cantilevers in sensing applications
Improving the sensitivity of piezoelectric excited millimeter-sized cantilevers in sensing applications
复制标题
提高传感应用中压电激励毫米级悬臂梁的灵敏度
DOI：
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发表时间：
2015
期刊：
影响因子：
--
通讯作者：
S. Asadi
中科院分区：
文献类型：
--
作者：
A. A. Kashi;M. Zamani;M. Shamshirsaz;S. Asadi
在本研究中，利用有限元分析研究了压电激励毫米级悬臂梁 (PEMC) 梁在质量和液位传感器等应用中的性能。为此，开发了有限元模型，并将模拟结果与实验结果进行比较，以验证所提出的模型。在验证所提出的模型后，该模型用于探索附加质量沿梁长度分布及其图案的影响，以及梁横截面轮廓变化对传感器灵敏度的影响。虽然以前的工作重点是在具有恒定矩形横截面的梁尖端涂覆附加质量的条件，但在本研究中，检查了梁不同区域中涂层质量的均匀分布和高斯分布。此外，还对作为质量传感器的具有非均匀梁截面（梯形形状）的 PEMC 进行了建模，并检验了传感器性能的改进。结果表明，涂层质量分布模式和涂层区域对传感器的性能都有很大影响。此外，目前的结果表明，与更传统的矩形传感器相比，梯形形状传感器更灵敏。为了将这项工作扩展到 PEMC 的其他传感应用，对具有梯形光束的液位检测传感器进行了建模和研究。相关结果表明，使用梯形光束的此类传感器也可以获得更高的灵敏度。
In this study, performance of piezoelectric excited millimeter-sized cantilever (PEMC) beams has been studied in applications such as mass and liquid level sensor using finite element analysis. For this purpose, a finite element model is developed and the simulation results are compared with experimental results in order to validate the proposed model. After validation of the proposed model, this model is used to explore the effects of distribution of added mass along beam’s length and its pattern and also effect of variation in beams cross section profile on sensor sensitivity. While previous works are focused on conditions in which added mass is coated at the tip of the beam with constant rectangular cross section, in present study uniform and Gaussian distributions of coated mass in different regions of beam are examined. Also, PEMC with a non-uniform beam cross section (trapezoidal shape) as mass sensor is modeled and the improvement of sensor performance has been examined. The results show that both pattern of coated mass distribution and the regions in which the mass is coated have massive effect on performance of sensor. Moreover, the present results indicate that trapezoidal shape sensors are more sensitive comparing to more conventional rectangular ones. In order to extend this work for other sensing applications of PEMC, liquid level detection sensors with trapezoidal shape beam are modeled and studied. The related results indicate that a higher sensitivity can be achieved for this type of sensors using trapezoidal shape beam too.
PEMC传感器在液浸状态下的质量变化灵敏度为20 pg/Hz。
影响因子：
12.6
作者：
Campbell,GossettA;Mutharasan,Raj
通讯作者：
Mutharasan,Raj