Study on Influence of Micro-vibration During the Optical Aspheric Surface Ultra-precision Grinding on Forming Accuracy
Study on Influence of Micro-vibration During the Optical Aspheric Surface Ultra-precision Grinding on Forming Accuracy
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发表时间：
2012
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通讯作者：
W. Qing-tang
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作者：
W. Qing-tang
在轴对称非球面光学元件的超精密磨削加工中，砂轮的不平衡和主轴的微振动都会直接影响加工精度和粗糙度。分析了磨削过程中的微振动现象，建立了由微振动引起的非球面球面半径偏差的数学模型，研制了一种精度为0.02μm的动态高精度微振动测量装置。针对所研制的大直径超精密非球面磨床，测量分析了砂轮转速和静压轴承油压对砂轮和主轴径向和轴向微振动的影响，确定了砂轮转速、静压轴承油压和主轴转速等参数，使砂轮和主轴的微振动达到最小。加工结果表明，直径500 mm的非球面加工误差小于4μm。
In ultra-precision grinding process of the axial symmetric aspheric optical element,both imbalance of grinding wheel and micro-vibration of spindle would directly affect the forming accuracy and roughness.Analyzed the phenomenon of micro-vibration in grinding,a mathematical model of the aspheric surface's spherical radius deviation caused by the micro-vibration was established,and a dynamic high-precision micro-vibration measurement device with accuracy of 0.02 μm was developed.For the developed large-diameter ultra-precision aspheric grinding machine,the influence of the rotation speed of grinding wheel and spindle and the oil pressure of hydrostatic bearing on the radial and axial micro-vibration of grinding wheel and spindle was measured and analyzed.The parameters of the rotation speed of grinding wheel and the oil pressure of hydrostatic bearing and the rotation speed of spindle were determined to make the micro-vibrations of grinding wheel and spindle minimum.The machining results show that the error of aspheric surface of 500 mm in diameter can be less than 4 μm.