3D correlative morphological and elemental characterization of materials at the deep submicrometre scale
3D correlative morphological and elemental characterization of materials at the deep submicrometre scale
复制标题
深亚微米尺度材料的 3D 相关形态和元素表征
DOI：
10.1111/jmi.12458
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发表时间：
2016
影响因子：
2
通讯作者：
J. Barnes
中科院分区：
文献类型：
--
作者：
A. Priebe;G. Goret;Pierre Bleuet;G. Audoit;J. Laurencin;J. Barnes
本文介绍了X射线计算纳米层析(CNT)与聚焦离子束飞行时间二次离子质谱仪(FIB-TOF-SIMS)在同一样品上的对比，以研究样品的形貌和元素结构。这种方法适用于尺寸为几十微米的相对较大的样品，同时保持100纳米量级的高空间分辨率。然而，结合X射线碳纳米管和FIB-TOF-SIMS断层扫描需要创新的样品制备方案，允许在完全相同的样品上进行这两个实验，而不会在两次测量之间对样品进行化学或结构上的修改。此外，还开发了专门的算法来进行有效的数据融合，这种融合带有九个自由度。这一方法已经使用多孔和异质固体氧化物燃料电池(SOFC)进行了测试，该燃料电池的特征大小相差三个数量级-从数百纳米的大孔和颗粒到数十微米宽的功能层。
This paper shows how X‐ray computed nanotomography (CNT) can be correlated with focused ion beam time‐of‐flight secondary ion mass spectrometry (FIB‐TOF‐SIMS) tomography on the same sample to investigate both the morphological and elemental structure. This methodology is applicable to relatively large specimens with dimensions of several tens of microns whilst maintaining a high spatial resolution of the order of 100 nm. However, combining X‐ray CNT and FIB‐TOF‐SIMS tomography requires innovative sample preparation protocols to allow both experiments to be conducted on exactly the same sample without chemically or structurally modifying the sample between measurements. Moreover, dedicated algorithms have been developed for effective data fusion that is biased with nine degrees of freedom. This methodology has been tested using a porous and heterogeneous solid oxide fuel cell (SOFC) that has features varying in size by three orders of magnitude – from hundreds of nanometre large pores and grains to tens of micron wide functional layers.