The silicon baekplane design for an LCOS polarization-insensitive phase hologram SLM
The silicon baekplane design for an LCOS polarization-insensitive phase hologram SLM
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DOI：
10.1109/lpt.2007.912690
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发表时间：
2008-01-01
影响因子：
2.6
通讯作者：
Xu, H.
中科院分区：
文献类型：
--
作者：
Moore, J. R.;Collings, N.;Xu, H.
通过将入射波长的四分之一波片（QWP）直接放置在硅背板的反射镜像素上方，并在QWP上方形成向列Freedrickcz单元以调制反射相位，在反射式空间光调制器中实现偏振不敏感性。为了从可用的硅工艺实现最高驱动电压，描述了开关电压公共前电极设计，其中对像素的可变幅度方波驱动以维持恒定的均方根驱动并使do平衡刷新周期期间的相位波动最小化。硅已经制造和液晶硅电池都与和没有QWP组装;应用包括光网络的光学透明开关，波分复用电信，电视组播和全息投影的分插复用器的光束转向。
Polarization-insensitivity is achieved in a reflective spatial light modulator by laying a quarter-wave plate (QWP) at the incident wavelength directly over the mirror pixels of a silicon backplane, and forming a nematic Freedrickcz cell over the QWP to modulate the reflected phase. To achieve the highest drive voltage from the available silicon process, a switched voltage common front electrode design is described, with variable amplitude square wave drive to the pixels to maintain constant root-mean-square drive and minimize phase fluctuations during the do balance refresh cycle. The silicon has been fabricated and liquid-crystal-on-silicon cells both with and without the QWP assembled; applications include optically transparent switches for optical networks, beam steering for add-drop multiplexers for wavelength-division-multiplexing telecommunications, television multicast, and holographic projection.