Engineering Performance in TCO Films for Energy Applications

Engineering Performance in TCO Films for Energy Applications
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用于能源应用的 TCO 薄膜的工程性能

DOI:
10.1149/1.3246846
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发表时间:
2009
期刊:
--
影响因子:
--
通讯作者:
G. Exarhos
G. Exarhos
中科院分区:
--
文献类型:
--
作者:
G. Exarhos

文献摘要

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同时表现出良好导电性和高透明度的薄膜材料将这种双重性归功于对组分的化学状态和伴随结构的仔细控制。通过控制沉积条件,可以容易地制备n型或p型半导体氧化物膜。这种薄膜能够实现能量转换装置的性能,并促进包括智能节能窗户在内的建筑元素的发展。本文总结了当前TCO的研究趋势,审查的处理方法,并提供工程高性能TCO薄膜的指导方针。还提供了一个一瞥的光学工程方法,其中阻抗匹配和量子力学隧道提供替代途径,以进一步改善薄膜性能。
Thin film materials that exhibit both good electrical conductivity and high transparency owe this duality to careful control of the chemical state of the constituents and the attendant structure. Through manipulation of deposition conditions n- or p-type semi-conducting oxide films readily can be prepared. Such films enable the performance of energy conversion devices and promote development of architectural elements including smart energy efficient windows. This paper summarizes current TCO research trends, reviews processing approaches, and offers guidelines for engineering high performance TCO films. Also provided is a glimpse of optical engineering approaches where impedance matching and quantum mechanical tunneling offer alternative avenues to further improvement of film properties.