Metal-dielectric filters for solar-blind silicon ultraviolet detectors.
Metal-dielectric filters for solar-blind silicon ultraviolet detectors.
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DOI：
10.1364/ao.54.003507
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发表时间：
2015-04
期刊：
影响因子：
1.9
通讯作者：
J. Hennessy;A. Jewell;M. Hoenk;S. Nikzad
中科院分区：
文献类型：
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作者：
J. Hennessy;A. Jewell;M. Hoenk;S. Nikzad
我们报道了直接沉积在硅基片上的金属-介质薄膜叠层的制备，用作紫外带通滤光片。与在透明基板上制造的类似设计相比，将这些滤波器集成到硅上改善了结构的导纳匹配，如果与基于Si的传感器平台一起使用，则导致更高的峰值传输或改善的带外抑制。用金属Al和原子层淀积Al 2 O3制作的测试结构用椭圆偏振光谱仪进行了表征，与光学模型吻合得很好。这些模型预测，对于简单的三层涂层，200-300 nm的光谱范围的透射率高达90%。
We report on the fabrication of metal-dielectric thin film stacks deposited directly onto silicon substrates for use as ultraviolet bandpass filters. Integration of these filters onto silicon improves the admittance matching of the structure when compared to similar designs fabricated on transparent substrates, leading to higher peak transmission or improved out-of-band rejection if used with a Si-based sensor platform. Test structures fabricated with metallic Al and atomic layer deposited Al2O3 were characterized with spectroscopic ellipsometry and agree well with optical models. These models predict transmission as high as 90% the spectral range of 200-300 nm for simple three-layer coatings.