Control of cavity cross section in microplasma devices: Luminance and temporal response of 200×100 and 320×160 arrays with parabolic Al2O3 microcavities
Control of cavity cross section in microplasma devices: Luminance and temporal response of 200×100 and 320×160 arrays with parabolic Al2O3 microcavities
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微等离子体器件中空腔横截面的控制：具有抛物线 Al2O3 微腔的 200×100 和 320×160 阵列的亮度和时间响应
DOI：
10.1063/1.3043685
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发表时间：
2009
期刊：
影响因子：
--
通讯作者：
J. Eden
中科院分区：
文献类型：
--
作者：
K. S. Kim;Taeklim Kim;Jongseung Yoon;S. Park;J. Eden
在Ne/O2混合气体中工作的具有抛物线截面Al 2 O3微腔和共形铝电极的大阵列微等离子体器件（50×50 ~ 320×160），观察到了强烈的绿色亮度和接近4 lm/W的发光效率。具有介电阻挡结构的Al/Al 2 O3微等离子体装置内的空腔的横截面几何形状和表面形态的精确控制已经用一系列湿电化学工艺实现。可以指定线性锥形和抛物线几何形状之间的腔横截面的连续变化，并且所有尺寸控制在± 2%以内。包围每个腔的铝电极是方位角对称的，并且每个电极的内表面与Al 2 O3微腔壁共形。由20000个器件组成的阵列（200×100）具有抛物线形的微腔壁轮廓和直径为160±2 μm的发射孔径，产生的绿色亮度>1800 cd/m2，峰值发光效率为1000 cd/m2。
Intense green luminance and luminous efficacies approaching 4 lm/W have been observed for large (50×50 to 320×160) arrays of microplasma devices with parabolic cross-sectional Al2O3 microcavities and conformal aluminum electrodes, operating in Ne/Xe gas mixtures. Precise control of the cross-sectional geometry and surface morphology of the cavities within Al/Al2O3 microplasma devices having a dielectric barrier structure has been achieved with a sequence of wet electrochemical processes. Continuous variation of the cavity cross section between a linear taper and parabolic geometry can be specified and all dimensions controlled to within ±2%. Aluminum electrodes encompassing each cavity are azimuthally symmetric and the inner face of each electrode is conformal to the Al2O3 microcavity wall. Arrays comprising 20 000 devices (in a 200×100 configuration) with a parabolic microcavity wall profile and an emitting aperture 160±2 μm in diameter produce a green luminance >1800 cd/m2 and a peak luminous efficacy o...