Nanolithography based on the formation and manipulation of nanometer-size organic liquid menisci.
Nanolithography based on the formation and manipulation of nanometer-size organic liquid menisci.
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DOI：
10.1021/nl0505243
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发表时间：
2005-06
期刊：
影响因子：
10.8
通讯作者：
R. V. Martinez;Ricardo Garcia
中科院分区：
文献类型：
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作者：
R. V. Martinez;Ricardo Garcia
有机液体如辛烷和1-辛烯形成了纳米尺寸的半月板，并被用来限制化学反应。在与硅表面相隔几纳米的导电扫描探头尖端之间施加偏置电压，可以在电场诱导下形成纳米尺寸的液体半月面，随后可以用来制造纳米尺寸的结构。我们报道了在0.1ms内制备了亚10 nm纳米结构。生长动力学研究表明，纳米结构的组成及其形成机理依赖于有机溶剂。这两种电压极性都可以用来生长纳米结构，尽管正偏压样品的生长速度要高得多。这些实验使我们能够在同一样品中产生两种化学上不同的纳米结构，它们很容易寻址和定位，并具有亚10纳米的特征。
Nanometer-size menisci of organic liquids such as octane and 1-octene have been formed and used to confine chemical reactions. The application of a bias voltage between a conductive scanning probe tip separated a few nanometers from a silicon surface allows the field-induced formation of nanometer-size liquid menisci that can subsequently be used to fabricate nanometer-size structures. We report the fabrication of sub-10-nm nanostructures in 0.1 ms. Growth kinetics studies reveal that the nanostructure composition and its formation mechanism are organic-solvent-dependent. Both voltage polarities can be used to grow nanostructures, although the growth rate is significantly higher for positively biased samples. These experiments allow us to produce in the same sample two chemically different nanostructures that are easily addressed and positioned and have sub-10-nm features.