Electron paramagnetic resonance and photoluminescence study of Er-impurity complexes in Si
Electron paramagnetic resonance and photoluminescence study of Er-impurity complexes in Si
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Si中Er-杂质配合物的电子顺磁共振和光致发光研究
DOI：
10.1103/physrevb.59.2773
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发表时间：
1999
影响因子：
3.7
通讯作者：
S. Coffa
中科院分区：
文献类型：
--
作者：
J. D. Carey;R. Barklie;J. Donegan;F. Priolo;G. Franzò;S. Coffa
利用电子顺磁共振（EPR）和光致发光（PL）谱研究了在77 K温度下，Er与O或F的多能注入在浮区硅中形成的Er-杂质复合物的结构和光学性质。注入后形成了2 μ m厚的非晶层，其中Er（10 ~（19）/cm ~ 3）和O（3× 10 ~（19）/cm ~ 3或10 ~（20）/cm ~ 3）或F（10 ~（20）/cm ~ 3）的浓度几乎均匀。将样品在氮气中在450 °C下退火30分钟（处理A）、处理A+620 °C下退火3小时（处理B）、处理B+900 °C下退火30秒（处理C）或处理B+900 °C下退火30分钟（处理D）。共注入浓度为3× 10 ~（19）O/cm ~ 3的样品经C处理后，其EPR谱呈宽线各向异性。这些样品具有最强烈的低温PL光谱，其中包含几个尖锐的峰归因于Er 3+的网站主要是立方Td对称性。增加O浓度到1020/cm 3产生尖锐的线EPR谱，其中最强的是由于两个Er 3+中心具有单斜C1 h和三角对称。单斜晶系的主g值和倾斜角分别为g1=0.80，g2=5.45，g3=12.60，τ=57.3°，g2 =0.69，三角晶系的主g值和倾斜角分别为g3 =3.24。低温PL谱显示出额外的尖锐线，但与3× 1019 O/cm 3的样品相比，总强度降低。对于含10 ~（20）O/cm ~ 3的样品，在处理B后，EPR至少观察到四个不同的中心，但在处理D后，没有观察到EPR谱。还观察到PL光谱根据具体的退火处理而改变，但即使在处理D之后，仍然观察到Er相关的PL。在10 ~（20）F/cm ~ 3的样品中，经B或C处理后，产生了一个归属于Er ~（3+）的EPR谱，其位置为单斜C_1h对称，g_（1）=1.36，g_（2）=9.65，g_（3）=7.91，τ=79.1°。
Electron paramagnetic resonance (EPR) and photoluminescence (PL) spectroscopy have been used to examine the structure and optical properties of erbium-impurity complexes formed in float-zone Si by multiple-energy implants at 77 K of Er together with either O or F. After implantation a 2-μm-thick amorphous layer was formed containing an almost uniform concentration of Er (1019/cm3)and O (3×1019/cm3 or 1020/cm3) or F (1020/cm3). Samples were annealed in nitrogen at 450 °C for 30 min (treatment A), treatment A+620 °C for 3 h (treatment B), treatment B+900 °C for 30 s (treatment C) or treatment B+900 °C for 30 min (treatment D). Samples coimplanted to have 3×1019O/cm3 and subject to treatment C show a broad line anisotropic EPR spectrum. These samples have the most intense low-temperature PL spectrum containing several sharp peaks attributed to Er3+ in sites with predominantly cubic Td symmetry. Increasing the O concentration to 1020/cm3 produces sharp line EPR spectra the strongest of which are attributed to two Er3+ centers having monoclinic C1h and trigonal symmetry. The principal g values and tilt angle for the monoclinic centers are g1=0.80, g2=5.45, g3=12.60, τ=57.3°, g∥=0.69, and g⊥=3.24 for the trigonal centers. The low-temperature PL spectrum from this sample showed additional sharp lines but the total intensity is reduced when compared to the sample with 3×1019O/cm3. For the sample containing 1020O/cm3 at least four distinct centers are observed by EPR after treatment B but after treatment D no EPR spectrum is observed. The PL spectra are also observed to change depending on the specific anneal treatment but even after treatment D, Er-related PL is still observed. Samples containing 1020F/cm3 and annealed with either treatment B or C produced an EPR spectrum attributed to Er3+in a site of monoclinic C1h symmetry with g1=1.36, g2=9.65, g3=7.91, and τ=79.1°.Tentative models for the structures of Er-impurity complexes are presented and the relationship between the EPR-active and PL-active centers is discussed.