T.Kiyota; H.Kuwabara; T.Ohmi; T.Shibata: "Precisely Ion Energy Controlled RF Bias Sputtering" Technical Report of the Institute of Electronics and Communication Engineers of Japan. SSD-86. 51-58 (SSD-86-55) (1986)
T.Kiyota; H.Kuwabara; T.Ohmi; T.Shibata: "Precisely Ion Energy Controlled RF Bias Sputtering" Technical Report of the Institute of Electronics and Communication Engineers of Japan. SSD-86. 51-58 (SSD-86-55) (1986)
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