Role of the wall reactor material on the species density distributions in an N2–O2 post-discharge for plasma sterilization

Role of the wall reactor material on the species density distributions in an N2–O2 post-discharge for plasma sterilization
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壁反应器材料对等离子体灭菌 N2-O2 后放电中物质密度分布的作用

DOI:
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发表时间:
2007
期刊:
影响因子:
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通讯作者:
J. Loureiro
J. Loureiro
中科院分区:
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文献类型:
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作者:
K. Kutasi;J. Loureiro

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利用三维流体力学模型计算了放置在N2-O2流动微波放电下游的大型放电后反应器中的物种密度分布。研究了氮(4S)和氧(3P)原子的表面损失对三种不同壁材(Pyrex,铝和不锈钢)的密度分布的影响。通过考虑每一种材料对应的不同表面损失概率以及假设从壁面产生NO所产生的影响,进行了评估和讨论。以65 × 25 × 25 cm3的后放电反应器为例进行了模拟,以2 Torr和2 × 103 sccm的流量为2450 MHz, N2-xO2混合物组成,x = 0.5-7%。
The species density distributions in a large post-discharge reactor placed downstream from a flowing microwave discharge in N2–O2 are calculated using a three-dimensional hydrodynamic model. The effects of surface losses of N(4S) and O(3P) atoms on the density distributions of different species in the reactor are investigated for three different wall materials: (i) Pyrex, (ii) aluminium and (iii) stainless steel. The effects produced by considering different surface loss probabilities corresponding to each one of these materials, as well as by assuming the production of NO from the wall, are evaluated and discussed. The simulation is conducted for the case of a 65 × 25 × 25 cm3 post-discharge reactor fed from a 2450 MHz discharge, at 2 Torr and 2 × 103 sccm flow rate, in an N2–xO2 mixture composition, with x = 0.5–7%.