Role of the wall reactor material on the species density distributions in an N2–O2 post-discharge for plasma sterilization
Role of the wall reactor material on the species density distributions in an N2–O2 post-discharge for plasma sterilization
复制标题
壁反应器材料对等离子体灭菌 N2-O2 后放电中物质密度分布的作用
DOI:
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发表时间:
2007
期刊:
影响因子:
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通讯作者:
J. Loureiro
中科院分区:
文献类型:
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作者:
K. Kutasi;J. Loureiro
The species density distributions in a large post-discharge reactor placed downstream from a flowing microwave discharge in N2–O2 are calculated using a three-dimensional hydrodynamic model. The effects of surface losses of N(4S) and O(3P) atoms on the density distributions of different species in the reactor are investigated for three different wall materials: (i) Pyrex, (ii) aluminium and (iii) stainless steel. The effects produced by considering different surface loss probabilities corresponding to each one of these materials, as well as by assuming the production of NO from the wall, are evaluated and discussed. The simulation is conducted for the case of a 65 × 25 × 25 cm3 post-discharge reactor fed from a 2450 MHz discharge, at 2 Torr and 2 × 103 sccm flow rate, in an N2–xO2 mixture composition, with x = 0.5–7%.