ULTRAHIGH-RESOLUTION X-RAY TOMOGRAPHY
ULTRAHIGH-RESOLUTION X-RAY TOMOGRAPHY
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DOI：
10.1126/science.266.5188.1213
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发表时间：
1994-11-18
期刊：
影响因子：
56.9
通讯作者：
YANG, L
中科院分区：
文献类型：
--
作者：
HADDAD, WS;MCNULTY, I;YANG, L
利用扫描透射x射线显微镜采集的软x射线，对微观测试对象进行了超高分辨率三维成像。测试对象由氮化硅窗口上的两种不同图案的金条组成，它们之间相隔约5微米。与横向分辨率相当的深度分辨率是通过记录物体在相对于光束轴的-50和+55度之间的角度的9个二维图像来实现的。然后通过使用代数重建技术的算法将投影组合成层析成像形成三维图像。观察到类似于1000埃的横向分辨率。重建中的人工制品将整体深度分辨率限制在6000埃左右；然而，一些特征被清晰地重建，深度分辨率接近1000埃。
Ultrahigh-resolution three-dimensional images of a microscopic test object were made with soft x-rays collected with a scanning transmission x-ray microscope. The test object consisted of two different patterns of gold bars on silicon nitride windows that were separated by similar to 5 micrometers. Depth resolution comparable to the transverse resolution was achieved by recording nine two-dimensional images of the object at angles between -50 and +55 degrees with respect to the beam axis. The projections were then combined tomographically to form a three-dimensional image by means of an algorithm using an algebraic reconstruction technique. A transverse resolution of similar to 1000 angstroms was observed. Artifacts in the reconstruction limited the overall depth resolution to similar to 6000 angstroms; however, some features were clearly reconstructed with a depth resolution of similar to 1000 angstroms.