Structural, mechanical and tribological properties of diamond-like carbon films prepared under different substrate bias voltage
Structural, mechanical and tribological properties of diamond-like carbon films prepared under different substrate bias voltage
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DOI：
10.1016/s0925-9635(02)00169-3
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发表时间：
2002-11
影响因子：
4.1
通讯作者：
Wei Zhang;A. Tanaka;K. Wazumi;Y. Koga
中科院分区：
文献类型：
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作者：
Wei Zhang;A. Tanaka;K. Wazumi;Y. Koga
