Microfluidic very large scale integration (mVLSI) with integrated micromechanical valves
Microfluidic very large scale integration (mVLSI) with integrated micromechanical valves
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DOI：
10.1039/c2lc40258k
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发表时间：
2012-01-01
期刊：
影响因子：
6.1
通讯作者：
Quake, Stephen R.
中科院分区：
文献类型：
--
作者：
Araci, Ismail Emre;Quake, Stephen R.
需要具有高密度控制元件的微流控芯片来改善器件性能参数，例如通量、灵敏度和动态范围。为了实现强大的和可访问的高密度微流控芯片，我们已经制造了一个整体的PDMS阀结构与三层，取代常用的两层设计。该设计通过多层软光刻技术实现，成本低，易于制造。通过仔细确定PDMS的工艺条件，我们已经证明，8 × 8和6 × 6 μ m（2）的阀门尺寸可以分别在约180和280 kPa的压差下操作。我们已经表明，这些阀门可以以接近每平方厘米100万个阀门的密度制造，大大超过了微流体大规模集成（mLSI）的现有技术（每平方厘米数千个阀门）。由于密度增加大于两个数量级，我们将这种技术描述为微流体超大规模集成电路（mVLSI），类似于其电子对应物。我们已经捕获和跟踪荧光珠，并通过在两个不同的实验中使用这些小型化的阀门来改变流体通道的电阻，证明阀门是防漏的。我们还证明了这些阀门可以通过多路复用来解决。
Microfluidic chips with a high density of control elements are required to improve device performance parameters, such as throughput, sensitivity and dynamic range. In order to realize robust and accessible high-density microfluidic chips, we have fabricated a monolithic PDMS valve architecture with three layers, replacing the commonly used two-layer design. The design is realized through multi-layer soft lithography techniques, making it low cost and easy to fabricate. By carefully determining the process conditions of PDMS, we have demonstrated that 8 x 8 and 6 x 6 mu m(2) valve sizes can be operated at around 180 and 280 kPa differential pressure, respectively. We have shown that these valves can be fabricated at densities approaching 1 million valves per cm(2), substantially exceeding the current state of the art of microfluidic large-scale integration (mLSI) (thousands of valves per cm(2)). Because the density increase is greater than two orders of magnitude, we describe this technology as microfluidic very large scale integration (mVLSI), analogous to its electronic counterpart. We have captured and tracked fluorescent beads, and changed the electrical resistance of a fluidic channel by using these miniaturized valves in two different experiments, demonstrating that the valves are leakproof. We have also demonstrated that these valves can be addressed through multiplexing.