Glass-embedded two-dimensional silicon photonic crystal devices with a broad bandwidth waveguide and a high quality nanocavity.
Glass-embedded two-dimensional silicon photonic crystal devices with a broad bandwidth waveguide and a high quality nanocavity.
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DOI：
10.1364/oe.18.019361
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发表时间：
2010-08
期刊：
影响因子：
3.8
通讯作者：
Seungwoo Jeon;Jingmin Han;B. Song;S. Noda
中科院分区：
文献类型：
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作者：
Seungwoo Jeon;Jingmin Han;B. Song;S. Noda
为了提高二维光子晶体板结构的力学稳定性并保持其优异的性能，我们设计了一种由宽带宽波导和高质量(Q)因子的纳米腔组成的玻璃嵌入硅光子晶体器件，然后使用自旋玻璃（SOG）制作该结构。此外，我们还发现，通过改变SOG的固化温度，SOG的折射率可以从1.37调节到1.57。最后，通过调整SOG的折射率，我们展示了一个Q因子高达16万的玻璃嵌入异质结构腔。
To enhance the mechanical stability of a two-dimensional photonic crystal slab structure and maintain its excellent performance, we designed a glass-embedded silicon photonic crystal device consisting of a broad bandwidth waveguide and a nanocavity with a high quality (Q) factor, and then fabricated the structure using spin-on glass (SOG). Furthermore, we showed that the refractive index of the SOG could be tuned from 1.37 to 1.57 by varying the curing temperature of the SOG. Finally, we demonstrated a glass-embedded heterostructured cavity with an ultrahigh Q factor of 160,000 by adjusting the refractive index of the SOG.