CALCULATION OF THE OPTICAL-CONSTANTS OF A THIN-LAYER UPON A TRANSPARENT SUBSTRATE FROM THE REFLECTION SPECTRUM
CALCULATION OF THE OPTICAL-CONSTANTS OF A THIN-LAYER UPON A TRANSPARENT SUBSTRATE FROM THE REFLECTION SPECTRUM
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DOI：
10.1088/0022-3727/22/8/021
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发表时间：
1989-08-14
影响因子：
3.4
通讯作者：
MINKOV, DA
中科院分区：
文献类型：
--
作者：
MINKOV, DA
本文提出了一种计算透明衬底上薄层光学常数的方法，该方法仅从薄层透射区域的反射光谱计算光学常数。考虑到衬底的有限尺寸，使用了频谱rm的最大值和最小值rm的包络。计算的算法类似于斯瓦内普尔（1983）使用透射谱提出的算法。该方法使计算层厚度和折射率n的误差在0.2%以内成为可能。得到了非晶层g19as21s60中n的色散关系的正确描述。
A method has been proposed for calculation of the optical constants of a thin layer upon a transparent substrate only from the reflection spectrum into the region of transmission of the layer. The envelopes of the maxima of the spectrum R M and of the minima R m are used, taking into account the finite dimensions of the substrate. The algorithm of the calculations is similar to the one proposed by Swanepoel (1983) using the transmission spectrum. The method makes it possible to calculate the thickness of the layer and the refractive index n with an error of 0.2%. The correct description of the dispersive relationship of n is obtained for an amorphous layer Ge 19 As 21 S 60.