Dimensional Micro- and Nanometrology at PTB
Dimensional Micro- and Nanometrology at PTB
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PTB 的尺寸微米和纳米计量学
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发表时间：
2011
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通讯作者：
Physikalisch
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作者：
R. Köning;J. Flügge;D. Hüser;W. Haessler;G. Dai;U. Brand;V. Nesterov;S. Bütefisch;G. Ehret;M. Wurm;B. Bodermann;H. Bosse;Physikalisch
在这篇文章中，我们将提供一个概述的当前状态和实际正在进行的发展领域的尺寸微米和纳米在PTB。也就是说，我们将报告在尺寸计量的这些重要领域中开发、应用和正在开发的高精度、可追溯测量的方法和仪器。在单个部件和整个系统的工业生产中，几何尺寸的控制需要适当的测量技术。必须根据不同的标准选择相关的测量仪器，如吞吐量，鲁棒性，价格，3D能力，在线能力，测量范围，所需的分辨率和精度。与此同时，在微型和微型系统技术领域中的尺寸特征可以在生产过程中基于可追溯的测量结果以与传统制造过程控制相同的方式进行表征和控制。在纳米技术中，产品的所需特性通常更强烈地依赖于几何尺寸，或者甚至表现为尺寸减小的结果，因此必须满足更严格的规格。在这里，过去二十年来在可用测量设备方面取得的进展恰好使这一技术领域成为可能。尺寸计量仪器旨在实现最小的测量不确定性，必须符合两个基本要求。首先，设计良好且特征良好的定位系统是必需的，该定位系统提供测量对象与其感兴趣的功能尺寸特征相对于测量仪器的探测系统的相对运动。其次，探测系统与样品尺寸特征相互作用的合理物理模型应可用，并应用于测量结果的评估。如果特征的尺寸接近探测系统的分辨率极限，这一点尤其重要。一些几何性质的测量，例如纳米颗粒的直径，在不考虑探针样品相互作用的情况下是根本不可能的。我们将在本文中展示不同的探测方法的例子，即触觉，光学触觉，光学和电子束方法，并讨论未来发展的挑战，在微观和纳米计量学。
In this contribution we will provide an overview of the current state and the actually ongoing developments in the field of dimensional micro- and nanometrology at PTB. That is, we will report on the methods and instruments developed, applied and that are in development for high precision, traceable measurements in these important areas of dimensional metrology. The control of the geometrical dimensions in the industrial production of single components and whole systems demands appropriate measurement techniques. The related measurement instruments have to be chosen according to different criteria like throughput, robustness, price, 3D-capability, in-line ability, measurement range, required resolution and accuracy. Meanwhile, dimensional features in the area of micro- and microsystem technology can be characterized and controlled during production on the basis of traceable measurement results in the same way as in conventional manufacturing process control. In nanotechnology the desired properties of the product often depend much stronger on the geometrical dimensions or even appear as a consequence of the reduced dimensions and therefore even tighter specifications have to be met. Here the progress made in the available measurement equipment over the last two decades has just enabled this field of technology. Dimensional metrology instruments aiming at the smallest measurement uncertainties achievable have to comply with two fundamental requirements. Firstly a well-designed and well-characterized positioning system, which provides a relative movement of the measurement object with its functional dimensional features of interest with respect to the probing system of the measurement instrument, is mandatory. Secondly, a sound physical model of the interaction of the probing system with the dimensional features of the sample should be available and applied in the evaluation of the measurement results. This is particularly important if the size of the features comes close to the resolution limit of the probing system. The measurement of some geometrical properties, for example the diameter of nanoparticles, is simply impossible without considering the probe sample interaction. We will show examples of different probing methods in this paper, namely tactile, opto- tactile, optical and electron beam methods and discuss challenges for future developments in micro- and nanometrology.