Metal organic plasma decomposition method for formation of zinc oxide thin film with low temperature and under atmospheric pressure
Metal organic plasma decomposition method for formation of zinc oxide thin film with low temperature and under atmospheric pressure
复制标题
低温常压金属有机等离子体分解形成氧化锌薄膜的方法
DOI:
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发表时间:
2019
期刊:
影响因子:
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通讯作者:
H. Akamatsu, S. Yamamoto, K. Ichikawa
中科院分区:
文献类型:
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作者:
高 義礼;高義礼,藤原修;高義礼,川又憲,石上忍,嶺岸茂樹,藤原修;高 義礼;Yoshinori Taka and Osamu Fujiwara;高義礼,藤原修;Hiroshi Akamatsu;Hiroshi Akamatsu;Hiroshi Akamatsu and Kazunori Ichikawa;Hiroshi Akamatsu;Hiroshi Akamatsu and Kazunori Ichikawa;H. Akamatsu and K. Ichikawa;Hiroshi Akamatsu, Shin-ichi Yamamoto,Kazunori Ichikawa;Hiroshi Akamatsu,Shin-ichi Yamamoto,and Kazunori Ichikawa;H. Akamatsu, S. Yamamoto, K. Ichikawa