Self-Calibrated Measurement of Ion Flow Using a Fine Multihole Directional Langmuir Probe
Self-Calibrated Measurement of Ion Flow Using a Fine Multihole Directional Langmuir Probe
复制标题
使用精细多孔定向朗缪尔探针自校准离子流测量
DOI：
10.1143/jjap.49.036101
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发表时间：
2010
影响因子：
1.5
通讯作者：
Masayoshi Y. Tanaka
中科院分区：
文献类型：
--
作者：
K. Terasaka;S. Yoshimura;T. Katahira;K. Ogiwara;M. Aramaki;Masayoshi Y. Tanaka
研制了一种用于测量离子马赫数的多孔定向朗缪尔探针（FM-DLP），并在电子回旋共振（ECR）等离子体中进行了实验。结果表明，FM-DLP可以用常规的定向朗缪尔探针（DLP）测量离子马赫数。此外，通过改变收集离子饱和电流的孔的纵横比，FM-DLP的灵敏度几乎是常规DLP的两倍。还发现，FM-DLP的电子饱和电流显着降低到离子饱和电流的水平，因此，FM-DLP的电流-电压特性变得类似于发射探针，这表明发射探针样功能的FM-DLP。我们已经证明，FM-DLP可以测量等离子体电位，这使我们能够确定校准因子没有其他诊断工具。因此，可以得出结论，FM-DLP具有自校准能力的离子流测量。
A fine multihole directional Langmuir probe (FM-DLP) has been developed to measure ion Mach number and tested in an electron cyclotron resonance (ECR) plasma. It is found that the FM-DLP can measure the ion Mach number with the same method used for a conventional directional Langmuir probe (DLP). Moreover, the sensitivity of the FM-DLP is almost twice as high as that of the conventional DLP by changing the aspect ratio of the hole that collects ion saturation current. It is also found that the electron saturation current of the FM-DLP is markedly reduced to the level of ion saturation current; thus, the current–voltage characteristics of the FM-DLP become similar to those of an emissive probe, which suggests the emissive-probe-like function of the FM-DLP. We have demonstrated that the FM-DLP can measure the plasma potential, which enables us to determine the calibration factor without other diagnostic tools. Therefore, it is concluded that the FM-DLP has a self-calibration capability for ion flow measurement.
影响因子：
8.6
作者：
Fujisawa, A;Itoh, K;Diamond, PH
通讯作者：
Diamond, PH