Development of nano and micro SQUIDs based on Al tunnel junctions
Development of nano and micro SQUIDs based on Al tunnel junctions
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基于铝隧道结的纳米和微米SQUID的开发
DOI：
10.1088/1742-6596/568/2/022019
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发表时间：
2014
期刊：
影响因子：
--
通讯作者：
Y. Maeno
中科院分区：
文献类型：
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作者：
R. Ishiguro;E. Watanabe;D. Sakuma;T. Shinozaki;S. Tsuchiya;Y. Nago;H. Osato;D. Tsuya;H. Kashiwaya;S. Kashiwaya;S. Nomura;H. Takayanagi;Y. Maeno
尺寸为纳米（微）米的超导量子干涉器件（squid）被称为纳米（微）- squid。纳米（微）squid对磁通和位置的高灵敏度可用于检测涡旋引起的局部磁场和介观超导体的磁化。基于碳纳米管结和铌弱结的纳米鱿鱼是众所周知的。然而，这种纳米鱿鱼不适合大规模集成电路和量产。因此，我们采用尼迈耶-多兰光刻技术和电感耦合等离子体反应离子刻蚀技术相结合的方法来制备纳米squid。本文报道了基于超导铝隧道结的纳米（微）- squid的制备及其在介观手性超导sr2ruo4涡旋形成中的应用[1-3]。
Superconducting quantum interference devices (SQUIDs) with nano (micro)-meter dimensions are called nano (micro)-SQUIDs. The high sensitivity for flux and position of nano (micro)-SQUIDs can be applied to detect local magnetic fields induced by vortices and the magnetization of mesoscopic superconductors. Nano-SQUIDs based on carbon-nanotube junctions and niobium weak junctions are well known. However, such nano-SQUIDs are not suitable for large-scale integrated circuits and mass production. Therefore, we employ a combination of lithography using the Niemeyer-Dolan technique and the inductively coupled plasma reactive-ion etching technique to fabricate nano-SQUIDs. Here, we report the fabrication of nano (micro)-SQUIDs based on superconducting aluminum tunnel junctions and their application for vortex formation into mesoscopic chiral superconducting Sr 2 RuO 4 [1-3].