Quantification of polyimide carbonization after laser ablation
Quantification of polyimide carbonization after laser ablation
复制标题
激光烧蚀后聚酰亚胺碳化的量化
DOI：
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发表时间：
2000
期刊：
影响因子：
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通讯作者：
A. Wokaun
中科院分区：
文献类型：
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作者：
F. Raimondi;S. Abolhassani;R. Brütsch;F. Geiger;T. Lippert;J. Wambach;J. Wei;A. Wokaun
用XeCl准分子激光（308 nm）辐照聚酰亚胺，用透射电子显微镜（TEM）和共焦拉曼显微镜研究了烧蚀区及其周围。在所有注量下均检测到消融区域周围的环状结构。在低于250 mJ/cm−2的能量密度下，在辐照区域内观察到锥形结构的形成。 环的宽度随能量密度增加而增加，随脉冲数增加而增加的幅度很小。环主要由多晶碳组成，具有相对较高的键角无序，厚度从火山口边缘径向减小。沉积碳的厚度由TEM分析确定，并使用两层模型由分配给碳和聚酰亚胺的拉曼谱带的强度比计算。比较这两个结果，可以得到沉积碳的吸收系数的估计。在锥形结构的顶部检测到碳，具有较高的结晶度和较低的结晶度。
Polyimide was irradiated with a XeCl excimer laser (308 nm) and the ablated area and its surrounding were studied using transmission electron microscopy (TEM) and confocal Raman microscopy. Ring-like structures surrounding the ablated area were detected at all fluences. At fluences lower than 250 mJ/cm−2 the formation of conical structures was observed within the irradiated area. The width of the rings increases with fluence and only slightly with the number of pulses. The rings consist mainly of polycrystalline carbon with a relatively high bond angle disorder, with thickness decreasing radially from the crater edge. The thickness of the deposited carbon was determined from TEM analysis and calculated from the intensity ratios of Raman bands assigned to carbon and polyimide using a two layer model. Comparing the two results an estimate of the absorption coefficient of the deposited carbon could be obtained. On top of the cone structures carbon was detected with a higher degree of crystallinity and lower...