Characterization of Thin Flexure Hinges for Precision Applications Based on First Eigenfrequency

Characterization of Thin Flexure Hinges for Precision Applications Based on First Eigenfrequency
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DOI:
10.1007/978-3-030-61652-6_2
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发表时间:
2020-11
期刊:
Microactuators, Microsensors and Micromechanisms
影响因子:
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通讯作者:
M. Darnieder;Felix Harfensteller;P. Schorr;Moritz Scharff;S. Linß;R. Theska
M. Darnieder;Felix Harfensteller;P. Schorr;Moritz Scharff;S. Linß;R. Theska
中科院分区:
其他
文献类型:
--
作者:
M. Darnieder;Felix Harfensteller;P. Schorr;Moritz Scharff;S. Linß;R. Theska

文献摘要

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具有小截面高度的柔性铰链由于其平稳和可重复的运动能力,在许多精密工程应用中是最先进的。然而,对制造业影响的高度敏感性代表着一种挑战。我们提出了一种基于自由振动测量的柔性铰链的表征方法,以便能够在设计过程的早期阶段考虑制造影响。对三种具有不同截面高度和高精度几何形状的半圆形柔性铰链进行了实验研究,并与三种理论建模方法进行了比较。对三个柔性铰链试件的计算结果与模型预测值的偏差较小,与尺寸测量结果一致。对于每种建模方法,都可以计算出最小缺口高度与标称值的偏差。该值又可用作后续使用相同制造方法制造柔顺机构的制造余量。一个示例性柔性平行曲柄机构证明了该概念对具有多个柔性铰链的柔性机构的适用性。
Flexure hinges with small cross-section heights are state of the art in numerous precision engineering applications due to their capability for smooth and repeatable motion. However, the high sensitivity to manufacturing influences represents a challenge. We propose a characterization method for flexure hinges based on the measurement of the free oscillation, to enable the consideration of manufacturing influences in the early stages of the design process. Three semi-circular flexure hinges with different cross-section heights and highly accurate geometry were investigated experimentally to compare them with three theoretical modeling approaches. The results for the three flexure hinge specimens showed small deviations to the predicted values from the models which is in agreement with the results of dimensional measurements. With each modeling approach, a deviation of the minimal notch height from the nominal value can be calculated. This value, in turn, can be used as manufacturing allowance for subsequent manufacturing of compliant mechanisms using the same manufacturing method. An exemplary compliant parallel-crank mechanism proves the applicability of the concept to compliant mechanisms with multiple flexure hinges.