Zinc oxide nanorod and nanowire for humidity sensor
Zinc oxide nanorod and nanowire for humidity sensor
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DOI：
10.1016/j.apsusc.2004.08.013
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发表时间：
2005-03-31
影响因子：
6.7
通讯作者：
Luo, LQ
中科院分区：
文献类型：
--
作者：
Zhang, YS;Yu, K;Luo, LQ
采用气相传输法在硅衬底上制备了ZnO纳米棒和纳米线薄膜，并研究了其湿敏特性。这些纳米材料薄膜显示出高湿度敏感性、良好的长期稳定性和快速的响应时间。结果发现，薄膜的电阻随相对湿度（RH）的增加而减小。在室温下（RT），电阻的变化超过四个和两个数量级时，观察到ZnO纳米线和纳米棒设备，分别暴露于97%的相对湿度的水分脉冲。这表明ZnO纳米材料薄膜可以用作高效的湿度传感器。(C)2004 Elsevier B.V.保留所有权利。
ZnO nanorod and nanowire films were fabricated on the Si substrates with comb type Pt electrodes by the vapor-phase transport method, and their humidity sensitive characteristics have been investigated. These nanomaterial films show high-humidity sensitivity, good long-term stability and fast response time. It was found that the resistance of the films decreases with increasing relative humidity (RH). At room temperature (RT), resistance changes of more than four and two orders of magnitude were observed when ZnO nanowire and nanorod devices were exposed, respectively, to a moisture pulse of 97% relative humidity. It appears that the ZnO nanomaterial films can be used as efficient humidity sensors. (C) 2004 Elsevier B.V. All rights reserved.