Cleaning Effects of Nano-Bubbles for Removing Minute Contaminated Particles from the Plate
Cleaning Effects of Nano-Bubbles for Removing Minute Contaminated Particles from the Plate
复制标题
纳米气泡去除板上微小污染颗粒的清洁效果
DOI:
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发表时间:
2004
期刊:
影响因子:
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通讯作者:
T.Morimatsu
中科院分区:
文献类型:
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作者:
A.Yabe;T.Morimatsu