Superhydrophobic hierarchical surfaces fabricated by anodizing of oblique angle deposited Al–Nb alloy columnar films
Superhydrophobic hierarchical surfaces fabricated by anodizing of oblique angle deposited Al–Nb alloy columnar films
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DOI：
10.1016/j.apsusc.2011.01.044
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发表时间：
2011-07
影响因子：
6.7
通讯作者：
T. Fujii;Y. Aoki;H. Habazaki
中科院分区：
文献类型：
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作者：
T. Fujii;Y. Aoki;H. Habazaki
采用斜角磁控溅射和阳极氧化相结合的方法制备了具有分级形貌的超疏水表面。采用磁控溅射法在扇形基底表面上以不同的沉积角度沉积了单相Al-Nb合金的孤立亚微米柱，沉积角度从70°增加到110°时，柱之间的间隙增大。然后，在热磷酸盐-甘油电解液中对柱状膜进行阳极氧化，在每个柱状体上形成纳米多孔阳极氧化层。这种具有亚微米/纳米多孔结构的表面已经涂覆有氟烷基磷酸盐层以降低表面能。涂层前的多孔表面是超亲水的，对水的接触角小于10°，而涂层后的接触角大于150°，是超疏水的。双尺度的孔隙率，以提高拒水性的有益效果，发现从接触角的亚微米柱状薄膜与无纳米多孔氧化物层的比较。柱之间较大的亚微米间隙也是优选的，以增加拒水性。
A combined process of oblique angle magnetron sputtering and anodizing has been developed to tailor superhydrophobic surfaces with hierarchical morphology. Isolated submicron columns of single-phase Al–Nb alloys are deposited by magnetron sputtering at several oblique deposition angles on a scalloped substrate surface, with the gaps between columns increasing with an increase in the deposition angle from 70° to 110°. Then, the columnar films have been anodized in hot phosphate–glycerol electrolyte to form a nanoporous anodic oxide layer on each column. Such surfaces with submicron-/nano-porous structure have been coated with a fluoroalkyl phosphate layer to reduce the surface energy. The porous surface before coating is superhydrophilic with a contact angle for water is less than 10°, while after coating the contact angles are larger than 150°, being superhydrophobic. The beneficial effect of dual-scale porosity to enhance the water repellency is found from the comparison of the contact angles of the submicron columnar films with and without nanoporous oxide layers. The larger submicron gaps between columns are also preferable to increase the water repellency.