Chemical sensing by analysing dynamics of plasma polymer film-coated sensors
Chemical sensing by analysing dynamics of plasma polymer film-coated sensors
复制标题
通过分析等离子体聚合物薄膜涂层传感器的动力学进行化学传感
DOI：
10.1016/0925-4005(94)01197-4
复制
发表时间：
1994
影响因子：
8.4
通讯作者：
R. Lemos
中科院分区：
文献类型：
--
作者：
M. Nakamura;I. Sugimoto;H. Kuwano;R. Lemos
提出了一种化学传感系统，该系统采用独特的传感膜，并利用其动态响应的模式识别。该系统由涂有等离子体聚合物薄膜的石英晶体微天平传感器阵列组成。用射频溅射法合成的薄膜具有较高的自由基位点和不饱和键密度。当该传感器阵列暴露于气体中时，目标气体的吸附和解吸在每个压电传感器中引起动态频率响应。通常采用自回归模型对传感器的响应进行分析，以估计动态系统的参数。该模型的系数反映了传感器的动态，提供了表征目标气体的模式向量。基于该模型，可以使用这些模式向量创建单个气体的分类图。这些图表明，动态传感器响应为气体分类提供了有用的信息。该模型还证实，我们的传感系统可以识别气体混合物的成分。
A chemical sensing system that incorporates unique sensor films and uses pattern recgonition of their dynamic responses is presented. This system consists of a sensor array of quartz-crystal microbalances coated with plasma polymer films. The films, synthesized by radio-frequency sputtering, are useful because of their high density of radical sites and unsaturated bonds. When this sensor array is exposed to a gas, the adsorption and desorption of the target gas causes a dynamic frequency response in each piezoelectric sensor. The sensor response is analysed by an autoregressive model typically to estimate the parameters of dynamic systems. This model's coefficients reflect the sensor dynamics, providing pattern vectors that characterize the target gas. Based on this model, classification maps for single gases can be created with these pattern vectors. Thesse maps show that the dynamic sensor response provides useful information for gas classification. This model also confirms that our sensing system can identify the components of a gas mixture.