Magnetic properties and microstructural analysis of sputter‐deposited and annealed Co‐Pt alloys
Magnetic properties and microstructural analysis of sputter‐deposited and annealed Co‐Pt alloys
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溅射沉积和退火 Co-Pt 合金的磁性能和微观结构分析
DOI：
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发表时间：
1995
期刊：
影响因子：
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通讯作者：
Ki
中科院分区：
文献类型：
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作者：
Sung‐Eon Park;P. Jung;Ki
我们在不同的衬底温度（RT-300 °C）和溅射压力（2-10 mTorr）下通过直流磁控溅射制备了Co 1 −xPtx（x=0.53和0.75）合金薄膜。用振动样品磁强计和克尔磁滞回线仪研究了薄膜的磁性能。在沉积态薄膜中观察到（111）织构，其程度取决于衬底温度和Ar压力。（111）织构的程度不影响磁各向异性。而Co0.25Pt0.75合金薄膜的磁性能对热处理不敏感，Co0.47Pt0.53合金薄膜的矫顽力和回线矩形度通过退火急剧增加。使用透射电子显微镜和X射线衍射法进行的结构分析表明，分别形成了CoPt（L10）和CoPt 3（L12）有序相，每个都具有强（111）织构。通过比较CoPt（L10）和CoPt 3（L12）有序相的磁性能与原子排列的关系，研究了CoPt（L10）和CoPt 3（L12）有序相的磁性能。
We have produced Co1−xPtx (x=0.53 and 0.75) alloy films by dc magnetron sputtering at various substrate temperatures (RT‐300 °C) and sputtering pressures (2–10 mTorr). The magnetic properties of the films were examined by using vibrating sample magnetometry and Kerr hysteresis loop tracer. A (111) texture is observed in the as‐deposited film, and its degree is dependent on the substrate temperature and Ar pressure. The degree of the (111) texture does not affect the magnetic anisotropy. While the magnetic properties of the Co0.25Pt0.75 alloy films are not sensitive to heat treatment, the coercivity and the loop squareness of the Co0.47Pt0.53 alloy films are drastically increased by annealing. Structural analysis using transmission electron microscopy and x‐ray diffractometry reveals that CoPt(L10) and CoPt3(L12) ordered phases, respectively, are formed, each with a strong (111) texture. By comparing the magnetic properties between the CoPt(L10) and CoPt3(L12) ordered phases in relation to the atomic arran...