Fabrication of tunable [Al2O3: Alucone] thin-film encapsulations for top-emitting organic light-emitting diodes with high performance optical and barrier properties
Fabrication of tunable [Al2O3: Alucone] thin-film encapsulations for top-emitting organic light-emitting diodes with high performance optical and barrier properties
复制标题
具有高性能光学和阻隔性能的顶发射有机发光二极管的可调[Al2O3:Alucone]薄膜封装的制造
DOI：
10.1016/j.orgel.2014.07.004
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发表时间：
2014-10-01
影响因子：
3.2
通讯作者：
Xue Kai-wen
中科院分区：
文献类型：
--
作者：
Sun Feng-Bo;Duan Yu;Xue Kai-wen
采用多层无机-有机叠层结构制备的薄膜电致发光器件，研究了用于顶部发光的有机电致发光器件（TEOLED）的薄膜电致发光器件（TFE）的光学和阻挡特性。采用三甲基铝（TMA）和O-3为前体，通过原子层沉积（ALD）制备了Al 2 O3无机防潮层，并对气体和蒸汽进行了有效的阻隔。采用分子层沉积法（MLD），以TMA和乙二醇为前驱体制备了有机铝酮层。[Al2O3：使用ALD/MLD膜，因为它们的可调节的无机-有机纳米层压物组成允许调节光学性质，从而增强它们用于TEOLED的高性能光外耦合结构的设计和制造的应用潜力。通过仔细调节无机-有机封装材料的相对厚度比，实现了优化的光提取，并且膜不仅保持了其高的防潮强度，而且还显示出优异的光学性能。(C)2014爱思唯尔有限公司版权所有。
The optical and barrier properties of thin-film encapsulations (TFEs) for top-emitting organic light-emitting diodes (TEOLEDs) were investigated using TFEs fabricated by stacking multiple sets of inorganic-organic layers. The inorganic moisture barrier layers were prepared by atomic layer deposition (ALD) of Al2O3 using trimethylaluminum (TMA) and O-3 as precursors and are shown to be efficient barriers against gases and vapors. The organic alucone layers were produced by molecular layer deposition (MLD) using TMA and ethylene glycol as precursors. The [Al2O3: Alucone] ALD/MLD films were used because their adjustable inorganic-organic nanolaminate composition allows for the tuning of the optical properties, thereby enhancing their application potential for the design and fabrication of high performance light out-coupling structures for TEOLEDs. By carefully adjusting the relative thickness ratio of the inorganic-organic encapsulation materials, optimized light extraction was achieved and the films not only maintained their high moisture barrier strength but also showed excellent optical performance. (C) 2014 Elsevier B.V. All rights reserved.