Micro-machined fluidic devices for terahertz time-domain spectroscopy

Micro-machined fluidic devices for terahertz time-domain spectroscopy
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用于太赫兹时域光谱的微机械流体装置

DOI:
10.1002/pssc.201084088
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发表时间:
2011
期刊:
physica status solidi c
影响因子:
--
通讯作者:
Baragwanath A
Baragwanath A
中科院分区:
--
文献类型:
--
作者:
Baragwanath A

文献摘要

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在这里,我们提出了一种用于太赫兹频率的硅基微加工流体装置,该装置在洁净室环境中使用标准光刻和微加工工艺制造。设计用于传统的传输太赫兹时域光谱(THz-TDS)布置,我们提出了一种可能的解决方案,解决目前阻碍太赫兹频率下水和生物系统分析的“水问题”。我们详细介绍了一系列实验的结果,强调了设备的灵敏度和潜在的广泛应用。 (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA,魏因海姆)
Here we present a silicon based, micro‐machined fluidic device for terahertz frequencies, fabricated using standard lithographic and micro‐machining processes in a cleanroom environment. Designed for use in a conventional transmission terahertz time‐domain spectroscopy (THz‐TDS) arrangement, we present a possible solution to the ‘water problem’ currently hampering the analysis of aqueous and biological systems at THz frequencies. We detail results from a range of experiments, highlighting the device sensitivity and potential, wide‐ranging applications. (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)