Micro-machined fluidic devices for terahertz time-domain spectroscopy
Micro-machined fluidic devices for terahertz time-domain spectroscopy
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用于太赫兹时域光谱的微机械流体装置
DOI:
10.1002/pssc.201084088
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发表时间:
2011
期刊:
影响因子:
--
通讯作者:
Baragwanath A
中科院分区:
文献类型:
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作者:
Baragwanath A
Here we present a silicon based, micro‐machined fluidic device for terahertz frequencies, fabricated using standard lithographic and micro‐machining processes in a cleanroom environment. Designed for use in a conventional transmission terahertz time‐domain spectroscopy (THz‐TDS) arrangement, we present a possible solution to the ‘water problem’ currently hampering the analysis of aqueous and biological systems at THz frequencies. We detail results from a range of experiments, highlighting the device sensitivity and potential, wide‐ranging applications. (© 2011 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)