The Multipole Resonance Probe: Progression and Evaluation of a Process Compatible Plasma Sensor
The Multipole Resonance Probe: Progression and Evaluation of a Process Compatible Plasma Sensor
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多极共振探头：过程兼容等离子体传感器的进展和评估
DOI：
10.1109/jsen.2014.2333659
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发表时间：
2014
影响因子：
4.3
通讯作者：
I. Rolfes
中科院分区：
文献类型：
--
作者：
C. Schulz;T. Styrnoll;R. Storch;P. Awakowicz;T. Musch;I. Rolfes
本文介绍了一种高灵敏度的等离子体传感器--多极共振探针（MRP），并讨论了它的工艺兼容性。基于其创新的概念和简单的“探针-等离子体”系统模型，介绍了其三个发展阶段。3D电磁场仿真是一种不可或缺的工具，可用于经济高效地调查和优化不同的传感器布局。独立于所选的传感器设计，开发的基于脉冲的测量设备产生经济的信号生成和评估。电子密度分布，确定与MRP和基于脉冲的系统在电容耦合等离子体中使用，确认和演示的模拟结果和测量概念，分别。
A robust and sensitive plasma sensor, the multipole resonance probe (MRP), and its process compatibility are presented and discussed in this paper. Based on its innovative concept and simple model describing the system “probe-plasma”, three steps of development are introduced. 3D electromagnetic field simulations are applied as an indispensable tool for an economical and efficient investigation and optimization of different sensor layouts. Independent of the chosen sensor design, a developed pulse-based measurement device yields an economical signal generation and evaluation. Electron density profiles, determined with the MRP and the pulse-based system utilized in a capacitive coupled plasma, confirm and demonstrate the simulation results and the measurement concept, respectively.