Transmission electron microscopy of threading dislocations in ZnO films grown on sapphire

Transmission electron microscopy of threading dislocations in ZnO films grown on sapphire
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蓝宝石上生长的 ZnO 薄膜中螺纹位错的透射电子显微镜

DOI:
10.1116/1.1397462
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发表时间:
2001
期刊:
Journal of Vacuum Science and Technology
影响因子:
--
通讯作者:
D. Shindo
D. Shindo
中科院分区:
--
文献类型:
--
作者:
S. Lim;J. Washburn;Z. Liliental;D. Shindo

文献摘要

被引文献

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用透射电子显微镜研究了生长在蓝宝石(1120)a面上的纤锌矿ZnO薄膜中的穿线位错。大多数的螺纹位错被发现是螺旋或混合字符。观察到位错半环,沿c轴沿着延长。它们很可能是两个符号相反的螺位错在生长过程中相互吸引而联合收割机形成的。
Threading dislocations in wurtzite ZnO films grown on the (1120) a plane of sapphire were studied by transmission electron microscopy. A majority of the threading dislocations were found to be of screw or mixed character. Dislocation half loops, elongated along the c axis, were observed. It is likely that they are formed when two screw dislocations of opposite sign attract each other during growth and combine.