The protection of MgO film against hydration by using Al2O3 capping layer deposited by magnetron sputtering method
The protection of MgO film against hydration by using Al2O3 capping layer deposited by magnetron sputtering method
复制标题
磁控溅射法沉积Al2O3覆盖层对MgO薄膜的水化保护
DOI：
10.1016/s0040-6090(03)00362-6
复制
发表时间：
2003
期刊：
影响因子：
--
通讯作者：
H. Kim
中科院分区：
文献类型：
--
作者：
Jae Hwan Eun;Jung Heon Lee;S. Kim;M. Um;Sun Young Park;H. Kim
