MULTIFUNCTIONAL PROBE MICROSCOPE FOR FACILE OPERATION IN ULTRAHIGH-VACUUM
MULTIFUNCTIONAL PROBE MICROSCOPE FOR FACILE OPERATION IN ULTRAHIGH-VACUUM
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DOI：
10.1063/1.109732
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发表时间：
1993-07-05
影响因子：
4
通讯作者：
GUNTHERODT, HJ
中科院分区：
文献类型：
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作者：
HOWALD, L;MEYER, E;GUNTHERODT, HJ
介绍了一种用于超高真空（UHV）遥控操作的扫描力/隧道显微镜（SFM/STM）。测头与样品之间的侧向力、法向力和隧道电流均可同时测量。光束偏转检测仪和样品位置可通过三个紧凑的惯性步进电机进行调节。介绍了一种兼容特高压的发光二极管，作为探测器中广泛使用的激光二极管的通用替代方案。本文给出了在5 X 10（-11）毫巴下在Si（111）上用STM和非接触式SFM以及在NaF（001）上用接触式SFM拍摄的图像。
A scanning force/tunneling microscope (SFM/STM) for remote controlled operation in ultrahigh vacuum (UHV) is described. The lateral forces, normal forces, and tunneling currents between probe tip and sample can all be measured simultaneously. The optical beam deflection detector and the sample position can be adjusted by means of three compact inertial stepping motors. An UHV-compatible light emitting diode is introduced as a general alternative to the widely used laser diode in the detector. Images, taken at 5 X 10(-11) mbar on Si(111) with STM and noncontact SFM, and on NaF(001) with contact SFM, are presented.