A Mechanically Coupled Three Degree-of-Freedom Resonator with Tunable Stiffness Sensitivity
A Mechanically Coupled Three Degree-of-Freedom Resonator with Tunable Stiffness Sensitivity
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DOI：
10.1016/j.sna.2022.113713
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发表时间：
2022-06
期刊：
影响因子：
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通讯作者：
Jianlin Chen;T. Tsukamoto;Shuji Tanaka
中科院分区：
文献类型：
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作者：
Jianlin Chen;T. Tsukamoto;Shuji Tanaka
本文报道了一种新型的三自由度机械耦合谐振器，其机械系统是普通双质量谐振器（DMR）和放大双质量谐振器（ADMR）的组合。首先在DMR模式（DMR的反相模式）和ADMR模式（ADMR的反相模式）之间观察到模式局域化现象。由于独特的结构设计，DMR和ADMR模式的谐振频率可以调谐到相同的值，从而使振幅比对结构摄动高度敏感。通过调整内刚度可以提高幅值比灵敏度，使ADMR模态接近DMR模态，内刚度对ADMR模态频率影响较大，对DMR模态频率影响较小。采用所提出的三质量谐振器方案，不需要使用极弱的耦合弹簧，有利于实际应用。测量结果表明，制备的频率差和灵敏度分别为110 Hz和210 Hz。通过对内部刚度进行静电软化，可以有效地将频率差减小到0.2 Hz以内，并将灵敏度显著提高到59922。
This paper reports a novel three degree-of-freedom (DoF) mechanical-coupled resonator whose mechanical system is a combination of a normal dual mass resonator (DMR) and an amplified dual mass resonator (ADMR). The mode localization phenomenon is firstly observed between the DMR mode (the anti-phase mode of DMR) and the ADMR mode (the anti-phase mode of ADMR). The resonant frequencies of the DMR and ADMR modes can be tuned to an identical value thanks to the unique structure design so that the amplitude ratio can be highly sensitive to the structural perturbation. The ADMR mode can approach the DMR mode and the amplitude ratio sensitivity can be enhanced by adjusting the inner stiffness, which largely affects the ADMR mode frequency while slightly influences the DMR mode frequency. Using the proposed triple-mass resonator scheme, it is not necessary to use an extremely weak coupling spring, which is advantageous for practical uses. The measurement results showed the as-fabricated frequency difference and sensitivity was 110 Hz and 210, respectively. The frequency difference could be effectively minimized to less than 0.2 Hz, and the sensitivity could be significantly enhanced to be 59922 by electrostatically softening the inner stiffness.