High Performance Motion Tracking Control for Electronic Manufacturing
High Performance Motion Tracking Control for Electronic Manufacturing
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DOI：
10.1115/1.2789467
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发表时间：
2007-11
影响因子：
1.7
通讯作者：
B. Potsaid;J. Wen;Mark Unrath;David Watt;M. E. Alpay
中科院分区：
文献类型：
--
作者：
B. Potsaid;J. Wen;Mark Unrath;David Watt;M. E. Alpay
电子制造中的运动控制要求既需要更高的速度又需要更高的精度，以适应不断缩小的部件/特征尺寸和更高的密度。然而，同时提高两个性能标准是困难的，因为谐振是固有的基础定位系统。本文介绍了一种前馈控制器的实验研究，设计了一个点到点的运动控制系统的现代和国家的最先进的激光加工系统的电子制造。我们系统地应用模型识别，逆动力学控制，迭代细化（以解决建模不准确），和自适应最小均方来实现高速轨迹跟踪。关键的创新在于使用所识别的模型来生成用于迭代学习控制的梯度下降，将来自学习控制的结果编码在有限脉冲响应滤波器中，并且在操作期间使用基于位置、速度和加速度前馈信号的最小均方更新来适应有限脉冲响应系数。实验结果表明，所提出的方法的有效性，其中的一个变化已经实施的生产机器上。
Motion control requirements in electronic manufacturing demand both higher speeds and greater precision to accommodate continuously shrinking part/feature sizes and higher densities. However, improving both performance criteria simultaneously is difficult because of resonances that are inherent to the underlying positioning systems. This paper presents an experimental study of a feedforward controller that was designed for a point-to-point motion control system on a modern and state of the art laser processing system for electronics manufacturing. We systematically apply model identification, inverse dynamics control, iterative refinement (to address modeling inaccuracies), and adaptive least mean square to achieve high speed trajectory tracking. The key innovations lie in using the identified model to generate the gradient descent used in the iterative learning control, encoding the result from the learning control in a finite impulse response filter and adapting the finite impulse response coefficients during operation using the least-mean-square update based on position, velocity, and acceleration feedforward signals. Experimental results are provided to show the efficacy of the proposed approach, a variation of which has been implemented on the production machine.