Optical emission generated by particle impact during aerosol deposition of alumina films
Optical emission generated by particle impact during aerosol deposition of alumina films
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DOI：
10.1080/21870764.2021.2006396
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发表时间：
2021-11
影响因子：
2.3
通讯作者：
Y. Matsubayashi;Tsuyohito Ito;K. Shinoda;K. Terashima;J. Akedo
中科院分区：
文献类型：
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作者：
Y. Matsubayashi;Tsuyohito Ito;K. Shinoda;K. Terashima;J. Akedo
摘要气溶胶沉积（AD）是一种在室温下通过微粒撞击制备陶瓷薄膜的方法。以往的研究认为AD过程中的光发射是分形发射或摩擦发射，然而，其机制从未被详细研究过。在这项研究中，使用He，Ar和N2的氧化铝膜的气溶胶沉积过程中产生的放电的光发射测量的光发射光谱。各光谱具有对应于载气的发射峰的峰，并且没有观察到黑体辐射特性。发射强度与气溶胶粒子的动能通量成正比，说明粒子碰撞过程中的发射是通过碎片发射发生的。气体温度保持在300 K左右，这定量地证实了AD是一个室温过程。图形摘要
ABSTRACT Aerosol deposition (AD) is a ceramic coating process that enables films to be fabricated by microparticle impact at room temperature. The optical emission during AD reported in previous studies is thought to be fracto-emission or triboemission; however, the mechanism has never been investigated in detail. In this study, the optical emission of the electric discharge generated during aerosol deposition of alumina films using He, Ar, and N2 was measured by optical emission spectroscopy. Each spectrum had peaks corresponding to the emission peaks of the carrier gas and no blackbody radiation characteristics were observed. The emission intensity was proportional to the flux of the kinetic energy of the aerosol particles, which suggested that the emission occurred via fracto-emission during particle impact. The gas temperature remained low at around 300 K, which quantitatively confirmed that AD is a room-temperature process. Graphical abstract