Extension sensing of piezo actuators using time-domain ultrasonic measurement and frequency-domain impedance measurement
Extension sensing of piezo actuators using time-domain ultrasonic measurement and frequency-domain impedance measurement
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DOI：
10.1007/s10832-011-9647-6
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发表时间：
2011-06
影响因子：
1.7
通讯作者：
E. Uzgur;Shin-Sung Kim;E. Bryce;D. Hutson;M. Strachan;K. Kirk
中科院分区：
文献类型：
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作者：
E. Uzgur;Shin-Sung Kim;E. Bryce;D. Hutson;M. Strachan;K. Kirk
精密微定位应用的多层压电致动器需要一种简单而准确的延伸传感方法。本文解释了多层压电执行器的三种不同的延伸传感技术，以提供一种合适的方法，主要涉及克服压电材料固有的迟滞行为。方法是：声脉冲时间传播的时域超声脉冲回波响应、超声换能器的频移响应谱以及单独执行器的阻抗谱中的频移。从结果来看，仅执行器阻抗谱中的频移方法被证明是三种方法中最有效的。结果发现，由于超声测量期间直流偏置下的声速变化，当针对时移和频移绘制延伸时，其他两种方法中固有的滞后行为被放大。展示了结果并就其对精确定位的适用性进行了讨论。
There is a requirement for a simple and accurate extension sensing method for multilayer piezoelectric actuators for precision micro-positioning applications. This paper explains three different techniques of extension sensing for multilayer piezoelectric actuators, to provide a suitable method which involves primarily overcoming the inherent hysteretic behaviour of piezoelectric materials. The methods were; time domain ultrasonic pulse echo response for time travel of acoustic pulses, frequency shift response spectrum of an ultrasonic transducer and frequency shift in the impedance spectrum of the actuator alone. From the results, method of the frequency shift in the impedance spectrum of the actuator alone proved to be the most effective of the three. It was found that due to acoustic velocity changes under DC bias during the ultrasonic measurements, the inherent hysteretic behaviour was amplified in the other two methods when extension was plotted against time-shift and frequency shift. The results are presented and are discussed in terms of their suitability for precise positioning.