Effects of nitrogen content on microstructures and mechanical properties of (AlCrTiZrHf)N high-entropy alloy nitride films
Effects of nitrogen content on microstructures and mechanical properties of (AlCrTiZrHf)N high-entropy alloy nitride films
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DOI：
10.1016/j.jallcom.2020.155063
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发表时间：
2020-09-05
影响因子：
6.2
通讯作者：
Liaw, Peter K.
中科院分区：
文献类型：
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作者：
Cui, Panpan;Li, Wei;Liaw, Peter K.
采用反应磁控溅射法制备了（AlCrTiZrHf）N高熵合金氮化物薄膜。采用X射线衍射（XRD）、扫描电镜（SEM）、高分辨透射电镜（HRTEM）、纳米压痕仪、涂层摩擦磨损试验机等研究了不同N2流量对（AlCrTiZrHf）N薄膜微观结构和力学性能的影响。结果表明，AlCrTiZrHf高熵合金薄膜呈非晶态。随着氮气流量的增加，（AlCrTiZrHf）N高熵合金氮化物薄膜转变为面心立方（FCC）结构。当N-2：Ar = 5：4时，薄膜的硬度和弹性模量分别达到33.1GPa和347.3GPa。这种强化作用主要是由于饱和金属氮化物相的形成和各种元素的固溶强化。同时，（AlCrTiZrHf）N膜表现出低摩擦系数和优异的上级耐磨性。基于高熵合金氮化物薄膜的优异性能，（AlCrTiZrHf）N薄膜在防护涂层方面具有潜在的应用前景。(c)2020 Elsevier B. V.保留所有权利。
The (AlCrTiZrHf) N high-entropy alloy nitride films were synthesized by reactive magnetron sputtering. The effects of different N-2 flow rates on the microstructures and mechanical properties of (AlCrTiZrHf)N films were studied by the X-ray diffraction (XRD), scanning electron microscopy (SEM), high-resolution transmission electron microscopy (HRTEM), nanoindentation, coating friction and wear tester. The results show that the AlCrTiZrHf high-entropy alloy film presents an amorphous state. With the increase of the N-2 flow rate, the (AlCrTiZrHf)N high-entropy alloy nitride films transform to a face-centered-cubic (FCC) structure. When the N-2:Ar ratio is 5:4, the hardness and elastic modulus of the films reach 33.1 GPa and 347.3 GPa, respectively. The strengthening effect is mainly attributed to the formation of saturated metal-nitride phases and the solid-solution strengthening of various elements. Meanwhile, the (AlCrTiZrHf)N film exhibits the low friction coefficient and superior wear resistance. Based on the excellent properties of high-entropy alloy nitride films, the (AlCrTiZrHf)N film presents a potential application in protective coating. (c) 2020 Elsevier B.V. All rights reserved.