High Work Density Gete Mechanical Phase Change Actuator
High Work Density Gete Mechanical Phase Change Actuator
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高工作密度 Gete 机械相变执行器
DOI：
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发表时间：
2019
期刊：
影响因子：
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通讯作者：
G. Piazza
中科院分区：
文献类型：
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作者：
J. Best;G. Piazza
本文报道了基于 GeTe 相变材料的新型非易失性 MEMS 执行器的制造和测试。所演示的执行器能够承受高达 7% 的单向应变，这可能与~ 200 J/cm3 的固有工作密度有关——比任何其他基于半导体的驱动材料高一个数量级。 GeTe 是一种相变材料，据报道，当在非晶态（较大）和晶态（较小）之间切换时，它会表现出较大的体积变化 [1]-[4]。我们将这些变化限制在一个非常适合制造微/纳米级垂直位移执行器的小几何形状中，并通过使用钨加热器对材料进行热循环来切换 GeTe 状态。非晶态和晶态在室温下都很稳定，使得执行器具有非易失性。对于 200 nm 厚的 GeTe 执行器，测量到非晶态和晶态之间的平均厚度差异为 14 nm，非常适合关闭/打开 NEMS 继电器中的触点。更广泛地说，考虑到这种材料的高工作密度，我们预计当以其他几何形状排列时，它会对微/纳米级执行器产生重大影响。
This paper reports on the fabrication and testing of a new class of non-volatile MEMS actuator based on GeTe phase change material. The demonstrated actuator is capable of unidirectional strain up to 7%, which can be related to an intrinsic work density of ∼ 200 J/cm3 – one order of magnitude beyond any other semiconductor-based actuation material. GeTe is a phase change material that has been reported to exhibit a large volume change when switched between the amorphous (larger) and crystalline (smaller) states [1]–[4]. We confine these changes in a small geometry ideal for the making of micro/nanoscale vertical displacement actuators and toggle the GeTe states by thermal cycling the material using a tungsten heater. Both amorphous and crystalline states are stable at room temperature, making the actuator non-volatile. An average 14 nm thickness difference was measured between amorphous and crystalline states for a 200 nm thick GeTe actuator, ideal for example for closing/opening a contact in NEMS relays. More broadly, given the high work density of this material, we expect it to have a significant impact on micro/nanoscale actuators when arranged in other geometries.