Freestanding Individual Single-walled Carbon Nanotube Synthesis Based on Plasma Sheath Effects
Freestanding Individual Single-walled Carbon Nanotube Synthesis Based on Plasma Sheath Effects
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DOI：
10.1143/jjap.43.l1278
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发表时间：
2004-09
影响因子：
1.5
通讯作者：
Toshiaki Kato;Goo-Hwan Jeong;T. Hirata;R. Hatakeyama;K. Tohji
中科院分区：
文献类型：
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作者：
Toshiaki Kato;Goo-Hwan Jeong;T. Hirata;R. Hatakeyama;K. Tohji
我们报告了使用极短时间（30秒）等离子体增强化学气相沉积（PECVD）工艺在低于650°C的相对较低温度下成功合成垂直排列单壁碳纳米管（SWNT）。基于详细的透射电子显微镜观察，发现所有由沸石固定的催化剂生长的短长度单壁碳纳米管都形成单独的形状。根据普通PECVD与我们的PECVD的比较，提出了PECVD下SWNT生长的几个要求。
We report the successful synthesis of vertically aligned single-walled carbon nanotubes (SWNTs) at relatively low temperatures below 650°C using very short-time (30 s) plasma-enhanced chemical vapor deposition (PECVD) process. Based on the detailed transmission electron microscopy observation, it is revealed that all of the short-length SWNTs growing from catalysts which are fixed by zeolites form individual shapes. According to the comparison between general PECVD and our PECVD, several requirements for the SWNT growth under PECVD are claimed.